7/11/2010	1:35:22 PM	Main Vac valve opened
7/11/2010	2:08:34 PM	Bypass valve opened
7/11/2010	2:08:39 PM	Bypass valve closed
7/11/2010	2:10:25 PM	Program exited cleanly
7/11/2010	2:10:27 PM	Program started normally
7/11/2010	2:10:27 PM	Helium valve closed
7/11/2010	2:10:27 PM	H2 valve closed
7/11/2010	2:10:27 PM	BCl3 valve closed
7/11/2010	2:10:27 PM	PH3 valve closed
7/11/2010	2:10:27 PM	SiCl4 pre valve closed
7/11/2010	2:10:27 PM	SiCl4 post valve closed
7/11/2010	2:10:27 PM	Main Vac valve closed
7/11/2010	2:10:27 PM	Bypass valve closed
7/11/2010	2:10:27 PM	Bubbler valve closed
7/11/2010	2:10:27 PM	Helium MFC set to  0.000000
7/11/2010	2:10:27 PM	H2 MFC set to  0.000000
7/11/2010	2:10:27 PM	BCl3 MFC set to  0.000000
7/11/2010	2:10:27 PM	PHl3 MFC set to  0.000000
7/11/2010	2:10:27 PM	SiCl4 MFC set to  0.000000
7/11/2010	2:10:27 PM	Bypass solenoid MFC set to  760.000000
7/11/2010	2:10:27 PM	Tube furnace set to 0
7/11/2010	2:10:30 PM	Main Vac valve opened
7/11/2010	2:36:13 PM	Main Vac valve closed
7/11/2010	2:59:56 PM	Main Vac valve opened
7/11/2010	3:00:35 PM	Bypass valve opened
7/11/2010	3:00:38 PM	Bypass valve closed
7/11/2010	3:00:41 PM	Bypass valve opened
7/11/2010	3:00:42 PM	Bypass valve closed
7/11/2010	3:00:58 PM	Bypass valve opened
7/11/2010	3:04:47 PM	Bypass valve closed
7/11/2010	3:04:48 PM	Main Vac valve closed
7/11/2010	3:06:20 PM	Main Vac valve opened
7/11/2010	3:07:35 PM	Main Vac valve closed
7/11/2010	3:11:39 PM	Main Vac valve opened
7/11/2010	3:26:22 PM	Main Vac valve closed
7/11/2010	3:36:37 PM	Main Vac valve opened
7/11/2010	3:38:01 PM	Bypass valve opened
7/11/2010	4:02:54 PM	Main Vac valve closed
7/11/2010	4:03:00 PM	Main Vac valve opened
7/11/2010	5:47:19 PM	Main Vac valve closed
7/11/2010	5:47:28 PM	Main Vac valve opened
7/11/2010	6:10:54 PM	Main Vac valve closed
7/11/2010	6:11:03 PM	Bypass valve closed
7/11/2010	6:25:54 PM	Main Vac valve opened
7/11/2010	6:27:40 PM	Main Vac valve closed
7/11/2010	6:27:49 PM	Main Vac valve opened
7/11/2010	10:42:30 PM	Main Vac valve closed
7/11/2010	11:00:54 PM	Main Vac valve opened
7/11/2010	11:01:01 PM	Main Vac valve closed
7/11/2010	11:01:09 PM	Main Vac valve opened
7/11/2010	11:02:12 PM	Bypass valve opened
7/11/2010	11:02:12 PM	Bypass valve closed
7/11/2010	11:02:49 PM	Main Vac valve closed
7/11/2010	11:07:00 PM	Bypass valve opened
7/11/2010	11:07:04 PM	Main Vac valve opened
7/11/2010	11:07:28 PM	Bypass valve closed
7/11/2010	11:07:30 PM	Main Vac valve closed
7/11/2010	11:07:36 PM	Main Vac valve opened
7/11/2010	11:07:36 PM	Bypass valve opened
7/11/2010	11:09:48 PM	Bypass valve closed
7/11/2010	11:09:49 PM	Main Vac valve closed
7/11/2010	11:10:54 PM	Bypass valve opened
7/11/2010	11:11:15 PM	Main Vac valve opened
7/11/2010	11:12:35 PM	Bypass valve closed
7/11/2010	11:12:35 PM	Main Vac valve closed
7/11/2010	11:12:38 PM	Main Vac valve opened
7/11/2010	11:12:38 PM	Bypass valve opened
